Re: Anyone know...?
I've seen 1 keV Ar ions used to sputter XPS samples. Takes longer than the 15-25 keV beams of Metal Ions used in SIMS.
What was your effective Xe ion energy? What was the application?
On a side note, I once saw a talk about how orbital velocity in LEO gives ambient O+ ions enough relative energy to sputter surfaces of spacecraft like the shuttle. It's only about 5eV but apparently thats enough.